Available to watch now, IUVSTA, in partnership with Ionautics, Hiden Analytical and Agilent Vacuum Products explore thin film deposition using Bipolar High-Power Impulse Magnetron Sputtering Want to ...

The planar magnetron is a typical diode mode sputtering cathode consisting of a permanent magnet array behind it. This magnet array is organized in such a fashion to provide a magnetic field that is ...